ENGS 135: Thin Films and Microfabrication Technology


Alternate years: 20W: 2


ENGS 24 or equivalent

This course covers the processing aspects of semiconductor and thin film devices. Growth methods, metallization, doping, insulator deposition, patterning, and analysis are covered. There are two major projects associated with the course — an experimental investigation performed in an area related to the student's research or interests, and a written and oral report on an area of thin film technology.