Reactive Evaporation

Reactive Evaporation

Reactive evaporation :

Metal atoms are evaporated from an evaporant source with a partial pressure of a reactive gas present in the chamber.


Reactive evaporation is preferred to direct evaporation

  1. During the evaporation, partial dissociation of the alloys, compounds.
    For example,
    • AL2O3 coatings prepared by direct evaporation are oxygen-deficient.
    • TiC coatings are carbon-deficient
  2. Reactive evaporation can form stoichiometric oxides, alloys
    • AL2O3 : evaporation in the presence of oxygen or a postdeposition anneal in oxygen
    • TiC : evaporation in the presence of a partial pressure of acetylene.