I. Introduction: What is SOI and why is it useful?

The term silicon-on-insulator refers to a group of technologies in which a thin layer of single crystal silicon is formed over a layer of insulator. The primary objective is to fabricate electronic devices in the silicon layer. The advantages of circuits formed in this manner over those formed in a uniform silicon substrate are principally the following:

(Cullen, 7)

(Diagram from Cullen, 93)

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