Microengineering Cleanroom Laboratory
Dartmouth College
Thayer School of Engineering
Director: Christopher G. Levey
Founder: Albert K. Henning
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| Lab Imagemap
| Overview
| Research
| Facilities/Equipment
| Processing
| Protocols
| Course Labs
| Career Jobs
| Related Web Sites
| bottom
To the left is an image map of the laboratory: you can click on a piece of equipment for more information about it, or use the text map instead.
More unmapped images here
Overview
The Dartmouth Solid State Microengineering Laboratory
includes class 100 and 1000
cleanroom
laboratories,
located in
room 223 of
Cummings Hall at the Dartmouth College
Thayer School of
Engineering
in Hanover, NH
03755-8000.
Currently funded research includes applications in
microelectronics,
micromachining,
MEMS, and
binary optics.
Equipment is available
for photolithography;
e-beam lithography;
wet chemical processing;
film deposition and processing;
analysis; and
design, layout, and simulation.
The microengineering laboratory is available to qualified
members of the Dartmouth community, and by arrangement to other local
research interests. Lab work in the cleanroom is an integral part of
several
undergraduate courses.
Students with projects in the
cleanroom range from first year undergraduates to graduate students.
Research
This page has served 
user references since January 1995
This page maintained by
Christopher.G.Levey[AT]dartmouth.edu
