Microengineering Cleanroom Supplies

CHEMICAL	STOCK QUANTITY (*-->reorder)
	  DATE:	6/95	10/95	4/96	7/96	7/97	3/98	9/99	2/01

H202(gal)	1.5*	4.5	1.8	.5*	2.5	2.0	3.8	.5
NH4OH(7lb)	2.5	5.5	2.5	4	3	2.8	1.5	2.5
NH4F(8lb)	2.5	2.5	1.5	1.5	2.1	1.9	1.5	0.2
Sh.TMAHdev(gal)	3	3	2.2	1.8	1.4	1.25	0.5	3.5
KTI.TMAH(gal)	4	4	3.3	3.3	3.3	3.3	3.3	3.3
25%TMAH(kg)	.8	.8	.6	.6	.4	.4	.4	.4

ACID
HF(semi10lb)	3	2.9	2.6	2.4	2.1	2.0	1.5	1.1
HF(not semi-Gibson)							.8
BHF(7:1)(9lb)				.9	.5	.5	.5	.5
Timeetch						.5	.5	.8
HCl(10lb37%=12M)1.5	5	4.2	3.5	3	2.5	1.6	.2
H3PO4(14lb)	3.5	3.2	3.1	3.1	3.1	3.1	3.1	3
HNO3(2.5l)	.5	.1*	.8	.5	.3	.25	0.2	1.8
CH3COOH(2.5l)	.5	.4	.2	.2	.2	.2	.1	1
H2SO4(10lb)	0*	1	.9	.9	.4	.4	.3	.2
CR7 (4L)							.3	.1

ORGANIC
Methanol(8pt)	2.5	2	1	.3*	3.5	3.5	.6+3	0+
Isopropyl(8pt)	3.5	3	2.2	2	.5*	3.5	.3+2	.5+
Acetone(4l)	2.5	5.5	3	2.1	.3	3.5	1+0	1.1+
TCA(8pt)	2.5	2.5	2.5	2.5	1.9	1.7	.7+2	.7+
Xylenes(8pt)	4	4	4	4	4	4	0+4	0+4

FreonTS(qt)	.2	.5	.5	.5	.5	.5	.5	.4
FreonTES(qt)	1	2	2	2	2	2	2	2
Chlorobenz(.5l)	.2	.2	.2	.2	.1*	.9	.4	.1	
Methylene Chloride				.1	1	1	0+
Toluene						1	1	1	0+

PHOTORESIST
Shply.posPR(qt)	1	.8	.3	.25+1	.1+.8	.1+.7 	.1+.3	.3+.3
WC.neg.PR(gal)	.75	.75	.75	.75	.75	.75	.75	.8
WC.neg.dev(gal)	4	4	4	4	4	4	4	.7+3
SU8(500ml)								.7
SU8Dev(1l)								.5
PMMA				1.5	1.4	1.3	1.2	1.2	1.2
PMMAdev(1Gal)	.75	.75	.75	.75	.70	.70	.7	.7
HMDS(pt)	3.5	3.5	3.5	3.5	3.3	3.3	2.3	2.1
ACTstrip(gal)	3	2.8	2.8	2.5	2.5	2.25	1.5	1.1
WCstrip(gal)	4	4	4	4	3.8	3.8	3.8	3.8
Gold Etch					0.8	.8	.8	.6

GLOVES
NitrileM(50)	2.5*	12	9.2	8.5	6.5	4.5	1.5+cs	6.5
NitrileL(50)	4	3*	11.5	10.5	7.5	6.5	1.5+cs	11.5
Latex6(12pr)	22.5	20	21.5		21	21	
Latex8(12pr)	2	3	3		3	3
Latex9(12pr)	1	1	1		1	1
Latex10(12pr)	2	2	2		2	2
Trionic9(pr)	8*	17	13	12	6	6	12	17
Trionic10(pr)	0*	20	12	11	12	8	6	29
Trionic11(pr)			12	4	13	9	2	10
	
GARMENTS (TYVEK...)
BouffantL(125)  3.25	2.7	2.1	1.9	4.5	4.1a	1.5	8
BouffantXL(125) .5*	4.2	4.1	3.9	5.5	5.2	7.5	6
FrockMsnap	27	27	26		26	26	17	7
FrockLsnap      19	18	17		17	15	13	9
FrockMzip       19	16	14		7	4	1	29
FrockLzip								28
FrockXLzip      5	4	3		3	2	1	28
FrockXXLzip     26	26	24		22	21	19	13
PantsM(pr)      31	29	28		27	26	22
PantsL(pr)      44	42	41		39	38	34
ShoeCvrsM(sngl)	166	144	124		102	94	16	106
ShoeCvrsL(sngl)	168	160	152		124	116	86	36

EYEWEAR
Goggles		13	14	13		10+2sml	9+2
SafetyGlasses	8	8	10+3ns		8	10
Overglasses(yellow)					3
SmSftyGls(blue)						4
UVlaserGoggles	4	4	4		4	4
UVlaserGlasses	1	1	1		1	1
IRlaserGlasses	1	1	1		1	1
IRlaserGoggles	1	1	1		1	1

WIPES
9x9TC(300)	3.5	1.9*	4.5	3.5	2.5	1.5		4.1
9x9TCII(300)	3.5	3.2	3.2	3.2	3	2.8		0
9x9FB(50)	4.5	4.2	4.2	3.8	3	2.5		2
9x9CW(50)					7 	6		5
12x12TC									7
12x12CW(50)	9.5	9.2	9.0	8.8	8	6.5		5
6x6TC(300)								3.5

Silicon WAFERS (3 inch)
A<100>tstRCA	6	1	2	1	0
B<100>tst(1-10)	39	16	9	6	1
C<100tst(3-10)	0	38	32	21	15
D<111>tst	7	7	7	7	7
E<100>5-10prime	21	21	21	21	21
F<110>dplsh prim	3	3	3	3
G<100>implanted(194 f95)	6	6	6
HsharpSIMOX			4	4	4
I<100>tst(1-10, +~2890A oxide)		4	3
J<100>tst(3-5)				7	5
K<100>tst(<.003) (Niyaz has another 8	8	8
L<100>(3-10)					6
M<100>(2-20)RCA					3
N<111>ES63RCA					5


Christopher.G.Levey@ dartmouth.edu