Date: Tue, 16 Aug 1994 19:43:52 -0400 (EDT) Reply-To: c.levey@Dartmouth.EDU For sieracki mask (looks darker than ND.3), needed 40 second exposure at 15mJ/cm2. The 10s exposure wouldn't develope through in even 3 minutes (photoresist partially developed is rough and looks black in the microscope). At 25 seconds there was still some debris in the "clear" regions.