Etching Metal Films

See also:

  • Electronics/MEMS materials etching sheet (pdf)
  • Metal Etchants from
  • BYU's Wet Etch Table
  • Berkeley Lab Manual Miscellaneous Etchants (or archived copy)

    Wet Chemical Etching

    (all ratios are by volume unless noted otherwise)

    Ag Al, Au Cr, Cu, Ni, Pt, Sb, Ti

    Dry Etching

    ...under construction...
    "Armin Kuebelbeck" , mems-cc@ISI.EDU There are several different Aluminium etchants know. Most of them are based on Phosphoric Acid 85%(about 60 to 90 parts per volume) and Nitric Acid 70% (about 2 to 10 parts per volume). Sometimes people add Acetic Acid (about 10-30 parts per volume) for better wetting behaviour and lower viskosity. Merck Corporation has about 10 different Aluminium etchants.