Overview of ENGS 85 - The Science of Micromachines Spring 2001 Levey

The course will be organized as a reading course with labs. Following some introductory lectures, reading will be assigned in the core areas below. We will meet twice a week to discuss the reading. Students are required to bring and turn-in questions on the reading; these questions, along with some I pose will be open for discussion. I may also assign a few problems and/or some specific group design problems at this stage. I expect the core material to take about half the term; maybe a bit more.

The second half of the term will be more like a journal club; each of us will do literature research on areas of interest, ask the others to read one paper which is particularly relevant, present the subject to the others, and all discuss the subject and the paper in particular. MEMS is a young enough field that the primary literature is accessible to undergraduates.

Labs: During the first half of the term, students will do labwork in the cleanroom. During the second half they will be expected to complete a reasonably sophisticated design project or a somewhat simpler design project and more in depth hands-on lab research (their choice).

Field Trip: Analog Devices MEMS line, Cambridge MA.

Required Textbook:

M. Madou, Fundamentals of Microfabrication, CRC Press, New York (1997)

Recommended additional textbook:

Gregory T. A. Kovacs, Micromachined Transducers Sourcebook, WBC/McGraw Hill (1998)

PRE-CORE material:

Review of necessary parts of Materials Science-independent reading for those

who haven't taken ENGS24.

CORE MATERIAL (with appropriate textbook chapters):

Micromachines Overview and examples

Micromachining Techniques Overview (Ch. 7)

Processing Overview

Processing details:

Thin Film Deposition (Ch. 3)

Photolithography (Ch. 1)

Etching (Ch. 2, 4)

CAD/design rule checking/mask making (Ch. 8)

Micromachining details:

Bulk micromachining (Ch. 4)

Surface micromachining (Ch. 5))

LIGA micromachining (Ch. 6)

ADDITIONAL TOPICS (examples of areas for "Journal Club" literature research):

Sensors (physical, electrical, magnetic, thermal, chemical, biological, …)

Actuators physical, electrical, magnetic, thermal, chemical, biological, …)

Optical devices (MOEMS)

Fluidic devices (fluidic logic, chemistry, biological assays, …)

Unusual MEMS materials



Simple lithography lab, perhaps extended to surface micromachining .

Bulk micromachining lab: probably make a diaphragm pressure sensor.


Design of sophisticated micromachine within the protocol for a foundry

service such as CRONOS MUMPS (3 layer PolySi, 2 layer oxide, 1 layer metal) or

Analog Devices (iMEMS), or Sandia. Design review and in class critiques. Design

rule checking. Devices will probably not be fabricated due to cost

(~$2500/run for CRONOS). A written report will be required.



30% CORE subjects class participation (including questions and any homework).

20% journal club presentations and participation.

20% initial labs in cleanroom.

30% final project-design review reports and final written report.

past student projects