TDB File: Generic This is a binary Tanner Database file. DO NOT EDIT!!!  l l P! 0f%%2G   0f1VersionxOMajor#MinorNAuthor8MOrganizationNInfo#TechnologyXNR1xN8tDxSR2NP=D |SetupOLayoutؙOLayerListXOCellsx*4_22 plate _283_22_2C 2_2E5_22 active_29xOLockedXXref`LayerList8line10Locked;XrefLayerListline25Locked<XrefkLayerListline50Locked-XreftLayerListmask _28top_29Lockedx=Xref=OrganizationLayerListdInstancesp^4_22 plate _283_22_2C 2_2E5_22 active_29_testpatternp_FabricationmaskflatHLockedXrefOrganizationLayerListhtest radialLockedXref(AuthorhOrganizationLayerListxtestpatternLockedXrefLayerList(Instancesline10@line25line50Xtest radial1xOX@("MASK(CPG)""MASK(CPG)"x1.0 08/22/1996 12:59:48"MASK(CPG)"h1.0 08/14/1996 15:19:26"MASK(CPG)","Grid Layer"mask blank for lino film printH1.0 08/22/1996 13:06:18p__p^d"MASK(CPG)","Grid Layer""MASK(CPG)","Grid Layer"=mask blank for lino film printx=1.0 08/22/1996 13:05:12t"MASK(CPG)"-1.0 08/14/1996 15:05:40k"MASK(CPG)"<1.0 08/14/1996 15:05:28"MASK(CPG)";81.0 08/14/1996 15:24:58`"MASK(CPG)","Grid Layer"XxOx*1.0 08/14/1996 14:25:10ؙO"Grid Layer","MASK(CPG)","MASK(CCP)","MASK(CAA)","New Layer 1","New Layer 2","New Layer 3","New Layer 4","New Layer 5","New Layer 6","New Layer 7","New Layer 8","New Layer 9","New Layer 10"O1.15 12/10/2008 19:06:03 |1.11 08/14/1996 15:24:21P=dxSLambda8txXNLambda#MASK (lino film)NMask lino film technology8MDartmouth CollegeNChris Levey#2dR Grid LayerR MASK(CPG)R MASK(CCP)R MASK(CAA)R New Layer 1R New Layer 2R New Layer 3R New Layer 4R New Layer 5R New Layer 6R New Layer 7R New Layer 8R New Layer 9 New Layer 10Cd"  ^`C C      Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q    ZC f3f3    Q Q Q Q f3f3Q Q Q Q Q    2C ̙3f̙3f    Q Q Q Q ̙3f̙3fQ Q Q Q Q    C     Q Q Q Q Q Q    C UU    Q Q UUQ Q Q Q    2ZC UU    Q Q UUQ Q Q Q    ZC UU    Q Q UUQ Q Q Q    ZC UU    Q Q UUQ Q Q Q    ZC  UU    Q Q UUQ Q Q Q    ZC  UU    Q Q UUQ Q Q Q    ZC  UU    Q Q UUQ Q Q Q    ZC   UU    Q Q UUQ Q Q Q    ZC   UU    Q Q UUQ Q Q Q    ZC  UU    Q Q UUQ Q Q Q    Za5UUUUUUUUUUUUUUUHKd Lyer"mask blank for lino film printH1.0 08/22/1996 13:06:18p__p^d"MASK(CPG)","Grid Layer"|MASK=mask blank for lino fjG7|:|{V6G7|OA7|6A7|ض:|8c6/c6~a6tOOOO86|x#:|%8|k8|H6xO(O*c6(OO 0.0000000000E+000tOsP6O#c6sP6O0K6q$c6"c6K$tOOa6O(V6(#c6V6L(0K6q$c6L c6 (a6(Q20UUUUUUUUUUUUUUUMASK (lino film)Lambdad d  Y  L HH RCPGRCCPRCAARLAY1RLAY2RLAY3RLAY4R LAY5R LAY6R LAY7R LAY8R LAY9RLAY10HQHH-QHH1QHH3QHHQHHQHHQHHQHH Q H H Q H H Q H H Q H H Q H H QH@ VddGnd MORBn2D.tdb RowCrosserTieHighTieLowCoreRowChannelCrossAbutY  Y  Y  0@ .TPR YI  CoreAbutFrame CornerPadVddPadGndPad UVLIB.tdbMirrorChipY  YY Y      Minimum POLY0 width Minimum POLY0 Space Minimum POLY1 width Minimum POLY1 space  ANCHOR1 width   ANCHOR1 Space  DIMPLE Width   DIMPLE Space  HOLE1 width  HOLE1 Space POLY1_POLY2_VIA Width POLY1_POLY2_VIA Space  ANCHOR2 Width   ANCHOR2 Space  POLY2 Width  POLY2 Space  HOLE2 Width  HOLE2 Space  Metal Width   Metal Space  POLY0 Space to ANCHOR1 2.6A POLY0 enclose ANCHOR1 2.6B POLY0 enclose POLY1 2.7C POLY0 enclose POLY2 2.8D POLY0 enclose ANCHOR2 2.9E POLY0 space to ANCHOR2 2.9F POLY1 enclose ANCHOR1 2-7G POLY1 enclose DIMPLE 2.14 N $POLY1 enclose POLY1_POLY2_VIA 2.10 H POLY1 enclose POLY2 2.15 O POLY1 space to ANCHOR2 2.12 K  DIMPLE space to ANCHOR1 2.18 U  POLY2 enclose ANCHOR2 2.8 J $POLY2 enclose POLY1_POLY2_VIA 2.10 L POLY2 cut-in POLY1 2.15 P POLY2 cut-out POLY1 2.15 Q POLY2 enclose METAL 2.13 M  POLY2 space to POLY1 2.11 I  HOLE2 enclose HOLE1 2.17a T          mpmems.xst3        Chris LeveyMask lino film technologyDartmouth College4qCd  ` l7, ` `4" plate (3", 2.5" active) Y 3 aCJjJjBvBv21[[DCY1818[[Y[D111Y1[DY[D[DY[D1 YJJBBYBvJjJjJjYJjBvYBvBvYBvJj @yXyXyXyX Chris Levey  Dartmouth College `:`line10 3HC   Chris Levey  Dartmouth Colleget /)``line25 Y +)ԟGC   Chris Levey  Dartmouth College `(`line50 Y W r3% C2 Z  Chris Levey  Dartmouth College   `  ` mask (top) Y ddCJa#AYts۔Y t^   Y g3_&&Y  g3   CddCJC #CJdC't Chris Levey  mask blank for lino film print   ` `maskflat Y <BKfMPkCY~,`6200+200uYf&~&f6Yf&f&CYƸ˚100+100uYʠƸʠYʠʠCY֊{l 30u linesYr|֊|rYr|r|CYҶPbטV10uY֞Q\ҶQ\֞VY֞Q\֞Q\CY׬#&spacesYֲֲ#&YֲֲCY0 200uY0 YCY(p*100uYv""v*Yv"v"CYz50uYYCY`B25uYH`HYHHCYӦ+n؈125uY׎,hӦ,h׎1Y׎,h׎,hCY `50uY`YCY~L`!V200+200uYfF~Ff!VYfFfFCYƸ &˚0100+100uYʠ Ƹ ʠ0Yʠ ʠ CY֊l 30u linesYr֊rґYrrCYҶÂט10uY֞|Ҷ|֞‘Y֞|֞|CY׬FspacesYֲֲFYֲֲCY08:200uY202:Y22CYHpJ100uYvBBvJYvBvBCYz$50uY$YCY`B$25uYH`H$YHHCYӦ؈25uY׎Ӧ׎ΑY׎׎CYt@z50uYu:u:zYu:u:CYf,H6200+200uYN&f&N6YN&N&CY֠ۂ100+100uYڈ֠ڈYڈڈCYr{T 30u linesYZ|r|ZYZ|Z|CYPbV10uYQ\Q\VYQ\Q\CY#&spacesY#&YCY 200uY YCYv(X*100uY^"v"^*Y^"^"CYb50uYhhYhhCYH*25uY0H0Y00CY+np125uYv,h,hv1Yv,hv,hCY `50uY`YCYfLH!V200+200uYNFfFN!VYNFNFCY֠ &ۂ0100+100uYڈ ֠ ڈ0Yڈ ڈ CYrT 30u linesYZrZґYZZCYÂ10uY||‘Y||CYFspacesYFYCY8:200uY22:Y22CYvHXJ100uY^BvB^JY^B^BCYb$50uYhh$YhhCYH*$25uY0H0$Y00CYp25uYvvΑYvvYt@z50uYu:u:zYu:u:CF>*.kPXFQ >I.k8=XaVN*>SPgVQ NI>S8=gaPW7&W7 ?& ?<BKfCY-W\YWPY-PY-YWYWP YF]?1܎Y>YFYF*Y>*Y> Y-7WbIYW8=Y-8=Y-aYWaYW8= YF]P?1I{Y>Q YFQ YFIY>IY>Q  Y=wg\YgPY=PY=YgYgP YVEO܎YNYVYV*YN*YN Y=w7gbIYg8==8=Y=aYgaYg8= YVEPOI{YNQ VQ YVIYNIYNQ  YkÝM2YÄ4YÄ Z YM2Y4Y Z Y?qM2YX4YX Z YM2Y4Y Z YEM2Y,4Y, Z Y}M2Y4Y Z YM2Y4Y Z YQM2Yj4Yj Z YM2Y4Y Z Y%WM2Y>4Y> Z YGyM2Y`4Y` Z YMM2Yf4Yf Z YSхM2Yl4Yl Z YYЋM2Yr4Yr Z Y_ϑM2Yx4Yx Z YeΗM2Y~4Y~ Z Yk͝M2Ÿ́4Ÿ́ Z Yq̣M2Y̊4Y̊ Z Yw˩M2Yː4Yː Z Y}ʯM2Yʖ4Yʖ Z Y&(?ZYY>Y>ZY<:YY<Y:Y=rYY=YrY>YY>FYY>YY>~YY>YY>YY,,Y"Y< Z Y+ YY< Z Y+tYY< Z Y*'ѣYё9Y< Z Y*^YLY< Z Y*YY< Z Y)PеYТcY< Z Y(OY<!Y; Z Y(YY; Z Y'dYPY; Z Y'`YtY; Z Y'/OY;CY; Z Y'͵Y͡Y; Z Y&YY; Z Y%cYNY: Z Y%ˬY˗Y: Z Y%YY: Z Y%~~ Y ~Y: Z Y%}xMY8}Y: Z Y$|xqY\|Y9 Z Y${njYw{Y9 Z Y$zƠYƋzY9 Z Y$yūYŖyY9 Z Y$xįYĚxY9 Z Y#wëYÖxY8 Z Y#w$ Y‹w9Y8 Z Y#v_YyvtY8 Z Y"uvYauY7 Z Y"tXzYCtY7e Z Y#tJ3Yt^Y7 Z Y#s YsY7 Z Y"sYs+Y6 Z Y"rYrY6 Z Y#rmYZr"Y6 Z Y"q1YqY5 Z Y"q0YqCY5 Z Y#pYpY5 Z Y"p}fYTpY4 Z Y"p4Y pFY4 Z Y#oYpY4 Z Y"oYsoY3 Z Y#o4Y$oY3 Z Y#oYoY3 Z Y#oqYoY2 Z YOcY YcTYO YOcY YcTYO Y`OjcY YecTYeO Y=OGcY YBcTYBO YO$cY YcTYO YOcY YcTYO YOcY YcTYO YOcY YcTYO YOcY YcTYO YkOucY YpcTYpO YO cY YcTYO YOcY YcTYO YOcY YcTYO YSO]cY YXcTYXO YOcY YcTYO YOcY YcTYO YOcY YcTYO YOOYcY YTcTYTO YOcY YcTYO YOcY YcTYO YOcY YcTYO YgOqcY YlcTYlO YOcY YcTYO YYOccY Y^cTY^O YOcY YcTYO YKOUcY YPcTYPO YOcY YcTYO Y=OGcY YBcTYBO YOcY YcTYO Y/O9cY Y4cTY4O YOcY YcTYO YOcY YcTYO YOcY YcTYO YOcY YcTYO Y(O2cY Y-cTY-O Y=OGcY YBcTYBO YRO\cY YWcTYWO YgOqcY YlcTYlO Y|OˆcY YˁcTYˁO YʑOʛcY YʖcTYʖO YktÝm2YÄTYÄt Z Ytm2YTYt Z Y?tqm2YXTYXt Z Ytm2YTYt Z YtEm2Y,TY,t Z Y}tm2YTYt Z Ytm2YTYt Z YQtm2YjTYjt Z Ytm2YTYt Z Y%tWm2Y>TY>t Z YGtym2Y`TY`t Z YMtm2YfTYft Z YStхm2YlTYlt Z YYtЋm2YrTYrt Z Y_tϑm2YxTYxt Z YetΗm2Y~TY~t Z Ykt͝m2Ÿ́TŸ́t Z Yqṭm2Y̊TY̊t Z Ywt˩m2YːTYːt Z Y}tʯm2YʖTYʖt Z Y&?qY2dY2 Y qYdY YqYdY YqYdY Y^wqYjdYj Y,EqY8dY8 YqYdY YqYdY YqYdY Yd}qYpdYp Y=tom2YVTYVt Z Yt m2YTYt Z Yutm2YTYt Z YtCm2Y*TY*t Z Ytm2YTYt Z YIt{m2YbTYbt Z Ytm2YTYt Z Ytm2YTYt Z YtOm2Y6TY6t Z Ytm2YTYt Z YiqYudYu Y7qY*dY* YqYdY YqYdY Y=VqYIdYI Y qYdY YqYdY Y\uqYhdYh Y*qYdY YqYdY Yy’qY…dY… YqYdY YqYdY YqYdY YqYdY Y!qYdY YqYdY Y'qYdY YqYdY Y-qY dY  YsҌqYdY YђѫqYўdYў YбqYнdYн YqYdY YqYdY Y'qYdY Y-FqY9dY9 YLeqYXdYX Yk˄qYwdYw YʊʣqYʖdYʖ Y 6Y Y62Y6Y 7jY Y7Y7jY 8Y Y8Y8Y 9JY Y9Y9JY :Y Y:Y:Y ;*Y Y;bY;*Y <Y Y<Y<Y = Y Y=BY= Y >zY Y>Y>zY <ZY Y< YZY = Y Y= .Y Y > Y Y> fY Y > Y Y> Y Y > :Y Y> Y :Y,2, YBY<  Z Y+  YY<  Z Y+ YY<  Z Y*Gѣ YёYY<  Z Y*^ YLY<  Z Y* YY<  Z Y)pе YТY<  Z Y(.O Y<AY;  Z Y( YY;  Z Y'd YPY;  Z Y' YY;  Z Y'OO Y;cY;  Z Y'#͵ Y͡7Y;  Z Y& YY;  Z Y%c YNY:  Z Y%ˬ Y˗Y:  Z Y% YY:  Z Y%  Y Y:  Z Y%M Y8Y:  Z Y$q Y\Y9  Z Y$nj YwY9  Z Y$Ơ YƋY9  Z Y$ū YŖY9  Z Y$į YĚY9  Z Y#ë YÖ'Y8  Z Y#D  Y‹YY8  Z Y# YyY8  Z Y"v YaY7  Z Y"X YC Y7  Z Y#j3 Y~Y7  Z Y#  YY7  Z Y"7 YKY6  Z Y" YY6  Z Y#/m YZBY6  Z Y"1 YY5  Z Y"P YcY5  Z Y# YY5  Z Y"f YTY4  Z Y"T Y fY4  Z Y# Y(Y4  Z Y" YsY3  Z Y#4 Y$Y3  Z Y# YY3  Z Y# YY2  Z Yy YtY Yy YtY Y`jy YetYe Y=Gy YBtYB Y$y YtY Yy YtY Yy YtY Yy YtY Yy YtY Ykuy YptYp Y y YtY Yy YtY Yy YtY YS]y YXtYX Yy YtY Yy YtY Yy YtY YOYy YTtYT Yy YtY Yy YtY Yy YtY Ygqy YltYl Yy YtY YYcy Y^tY^ Yy YtY YKUy YPtYP Yy YtY Y=Gy YBtYB Yy YtY Y/9y Y4tY4 Yy YtY Yy YtY Yy YtY Yy YtY Y(2y Y-tY- Y=Gy YBtYB YR\y YWtYW Ygqy YltYl Y|ˆy YˁtYˁ Yʑʛy YʖtYʖ YSӅM2Yl4Yl Z YҽM2Y4Y Z Y'YM2Y@4Y@ Z YёM2YѪ4YѪ Z Y-M2Y4Y Z YeЗM2Y~4Y~ Z YM2Y4Y Z Y9kM2YR4YR Z YΣM2Yμ4Yμ Z Y ?M2Y&4Y& Z Y/aM2YH4YH Z Y5gM2YN4YN Z Y;mM2YT4YT Z YAsM2YZ4YZ Z YGyM2Y`4Y` Z YMM2Yf4Yf Z YS݅M2Yl4Yl Z YY܋M2Yr4Yr Z Y_ۑM2Yx4Yx Z YeڗM2Y~4Y~ Z Y('4Y> Z YM2Y4Y Z Y]ďM2Yv4Yv Z Y+M2Y4Y Z YÕM2Yî4Yî Z Y1cM2YJ4YJ Z YM2Y4Y Z Yi›M2Y‚4Y‚ Z Y7M2Y4Y Z YM2Y4Y Z YQ(jTY>t Z Ytm2YTYt Z Y]tďm2YvTYvt Z Yt+m2YTYt Z YÕtm2YîTYît Z Y1tcm2YJTYJt Z Ytm2YTYt Z Yit›m2Y‚TY‚t Z Yt7m2YTYt Z Ytm2YTYt Z YQjqY]dY] YqYdY YûqYdY YpÉqY|dY| Y%>qY1dY1 YqYdY Y¨qY›dY› YD]qYPdYP YqYdY YqYdY YazqYmdYm YqYdY YgрqYsdYs YqYdY YmІqYydYy Y qYdY YsόqYdY YqYdY YyΒqY΅dY΅ YqYdY Y[tqYgdYg YzqYdY YqYdY Y߸qYdY YqYdY YqYdY Y.qY!dY! Y4MqY@dY@ YSlqY_dY_ YrڋqY~dY~ Y Y Y2YY jY YYjY  Y Y Y Y !JY Y!Y!JY "Y Y"Y"Y #*Y Y#bY#*Y $Y Y$Y$Y % Y Y%BY% Y &zY Y&Y&zY $ZY Y$ YZY % Y Y% .Y Y & Y Y& fY Y & Y Y& Y Y & :Y Y& Y :Y2 YBY$  Z Y YY$  Z Y YY$  Z YG YyYY$  Z YF Y4Y$  Z Y YY$  Z Yp YY$  Z Y.7 Y$AY#  Z Y Y߳Y#  Z YL Y8Y#  Z Y Y޳Y#  Z YO7 Y#cY#  Z Y#ݝ Y݉7Y#  Z Y YY#  Z Y K Y6Y"  Z Y ۔ YY"  Z Y  YڽY"  Z Y  YY"  Z Y 5 Y Y"  Z Y Y YDY!  Z Y t Y_Y!  Z Y ֈ YsY!  Z Y Փ Y~Y!  Z Y ԗ YԂY!  Z Y ӓ Y~'Y   Z Y D҈ YsYY   Z Y v YaY   Z Y ^ YIY  Z Y @ Y+ Y  Z Y j Y~Y  Z Y  YY  Z Y 7 YˮKY  Z Y ʏ Y{Y  Z Y /U YBBY  Z Y  YY  Z Y P YcY  Z Y ŕ YŃY  Z Y N Y<Y  Z Y T YfY  Z Y  Y(Y  Z Y l Y[Y  Z Y  Y Y  Z Y  YY  Z Y z YkY  Z Yy YtY Ykuy YptYp YHRy YMtYM Y%/y Y*tY* Y y YtY Yy YtY Yy YtY Yy YtY Yvy Y{tY{ YS]y YXtYX Yy YtY Yýy YtY Y|Æy YÁtYÁ Y;Ey Y@tY@ Yy YtY Y¹y Y¾tY¾ Yx‚y Y}tY} Y7Ay Y<tY< Yy YtY Yy YtY Yy YtY YOYy YTtYT Yy YtY YAKy YFtYF Yкy YпtYп Y3=y Y8tY8 YϬ϶y YϱtYϱ Y%/y Y*tY* YΞΨy YΣtYΣ Y!y YtY Yy YtY Yy YtY Yy YtY Yy YtY Yy YtY Y%/y Y*tY* Y:Dy Y?tY? YOYy YTtYT Ydny YitYi Yyڃy Y~tY~  W<W &u 7&u7<W)Wu7u7) ?< ? & &< ?) ?)$VBKfB' Chris Levey  mask blank for lino film printԙ `` test radial ׻'$Q+C$\$<t t   ! T! ! T" "" #4#l#4$$$"" ##X$$$,$,$d$d\''l" Z  &&" Z &&" Z q&&w" Z '&D&29" Z %%" Z %%" Z X%5%"k! Z $$-! Z  $J$6! Z  ##! Z  y#5#!! Z  M""a! Z  &!!;! Z  !I!4  Z   }  Z    Z    Z  3  Z  WB Z  r] Z  q Z  | Z  ( Z  <|Q Z  nq߃ Z  ީt_޾ Z \G Z >)4 Z  ܔܨ Z    Z au Z y Z  YS@l Z    Z z  ٍ Z    . Z  L : Z ~ؐ Z  AR Z jY Z    Z   Z  ׻xi Z    0"`0; ` testpattern Y t5l7:%!N-na %&N    Na N     ]Na bN A   N@a N #   Ym,.Y     %'-: %&' cj   '": ' }cj    V': b' Kcj    I b dcj   ': ' 2cj   % .  %& cj   -  cj   CY200+200uYzzYzzCY!HZ&*d100+100uY%0T!HT%0dY%0T%0TCY1z:5 30u linesY5{41{45 5{45{4C-FN2(T10u1.O-FO1.T 1.O1.OC-Z2