Sputtering Targets Available to users of Cooke sputtering system
Sputtering Targets for Cooke --Thayer Microengineering Lab
MAT'L SIZE PURITY PI/LOT
______ _______ ________ ____________________
Al 2x.125 99.999% Levey/lot 99-0543 TMI
Al2O3 1.9x.12 99.99% lot 990242 TMI
Au 2x.125 ? Levey
Bi 2x.375
Cu 2x.125 99.997% lot 98-0154 TMI
CuCup 2x.25 ? lot 0550-20340
CuInCp 2x.25 ? lot 20340
Bronze 2x.125 99.99% Petrenko/lot 99-1083 UVM PO 54764
Co 2x.125 99.95% Sullivan/lot SCI-980498 TMI
Cr 2x.125 99.95 Sullivan/lot 970088 TMI
FeAl 2x.125 ? Baker
MgF2 2x.250 99% lot SCI 40773 so15581-C1
MoSi2 lot 960502 DO40990200C25
ITO broken
Ni 2x.062 99.5% Levey/lot 94-0218 TMI (MISSING?)
Pt 2x.125 99.99% Petrenko/lot 99-1082 UVM PO 54764
Si 2x.125 99.999% D0140000200A50
SiO2 2x.125 ? Levey (MISSING?)
Ti 2x.125 99.7 Petrenko/lot 970340 TMI
Zr 2x.250 99.2% Sullivan lot 96031 D040000020022
TMI=Target Materials Inc (Superconductive Components), Colombus OH
UVM=United Vacuum Materials, Paterson NJ
Christopher.G.Levey@
dartmouth.edu