Atm Diffusion Furnaces
Triple stack 4" diameter tube Minibrute diffusion furnaces by Thermco,
for use at atmospheric
pressure and temperatures between 400 and 1150C (1200C for short times).
Flowmeter calibrated is for nitrogen; other gasses require a
- Water Vapor (bubbler)
- Forming gas flow are available,
For short time single wafer processing or if
a rapid ramping of temperature up to 1200C is desired,
a Rapid Thermal Anneal is
more appropriate than a diffusion furnace run.