July 7, 1995
From: Jennifer.Frida.Kaira@Dartmouth.EDU (Jennifer Frida Kaira)
Title: Fabrication and evaluation of flexible microgipper
Author: Suzuki, Yoshihiko
Source:Japanese Journal of Applied Physics
part 1: Regular Papers & Short Notes &
Review Papers 33 4A April 1994.
This paper proposes a new type of flexible microgripper (FMG) which is
electrothermally and electromagnetically driven and has low driving voltage.
It presents design, theortical consideration, fabrication and finger
characteristics. In order to confirm their method, the paper demonstrates the
capability of the flexible finger motion of the FMG.
From: Simone M. Ferdinand (co-presented with Weldon Knighton)
Title: A Method to Etch Undoped Silicon Cantilever Beams
Authors: Wai-shing Choi, Jan G. Smits
Publication: Journal of Microelectromechanical Systems, Vol. 2., No. 2., Pages
Date: June 1993
The article outlines a method of fabricating silicon cantilever beams
oriented in the <100> direction by etching (100) silicon wafers. The scheme
uses two masks. Anisotropic etching is performed in sodium hydroxide to
produce cantilevers with background doping concentration levels and vertical
edges. This method is presented as an alternative to those which use
back-etching, heavily doped boron etch stops, or anodic oxidation etch stops.
From: Nicholas.C.Fuller@Dartmouth.EDU (Nicholas C. Fuller)
Title: Evaluation of an ingestible telemetric temperature sensor
for deep hyperthermia application
Source: International Journal of Radiation,
Oncology, Biology, and Physics
My most recent article came from the International Journal of Radiation,
Oncology, Biology, and Physics entitled "Evaluation of an ingestible telemetric
temperature sensor for deep hyperthermia applications". This article discussed
the use of a temperature sensitive quartz crystal to monitor temperatures in
regions of the body where heat is being applied to treat tumors. The device
known as a radio pill is 2cm in length and icm in diameter and as such is
unable to treat areas where it would have to pass through the blood stream. The
functioning of the device can be deduced from its nomenclature. The device
contains a temperature sensitive crystal which is coupled to an inductor. This
circuit, powered by a siver oxide battery, functions like a L.R.C. circuit
producing radio waves as it oscillates. The output signal is detected by a
receiver outside of the body. Several factors, such as, elctrmagnetic
interference, ionizing radiation doses were studied to test the efficiency of
the crystal. Future work for the device would be centered around the
decreasing the size of the device and on improving the accuracy of its results
which, up to that time, fell below theH.P.C.'s alllowed experimental error
From: Zahid.Maqsud@Dartmouth.EDU (Zahid Maqsud)
Title: A Computer-Aided Design System for
Microelectromechanical Systems (MEMCAD)
Authors: Stephen D. Senturia, Robert M. Harris, Brian P. Johnson,
Songmin Kim, Kieth Nabors, Matthew A. Shulman, Jacob K. White.
Source: Journal of Microelectromechanical Systems, Vol 1, No. 1, March 1992.
From: Carla.N.Shelton@Dartmouth.EDU (Carla N. Shelton)
Title: Metallic Microstructures Fabricated Using Photosensitive Polyimide
Authors: A. Bruno Frazier and Mark G. Allen, member, IEEE
Source: Journal of Microelectromechanical systems, Vol 2, No 2, June 1993
Comments: This article discusses the use of photosensitive polyimide
electroplating molds in the fabrication of metallic microstructures (eg.
microactuators or micromotors)
This article outlines the basic process which illuminates the
advantages of using Photosensitve polyimide electroplaing molds in comparison
with the LIGA process. I chose this particular article because it outlines a
process similar to the one we are using in our exploration of micromachine
From: Joshua Albert Logan
Author: O'Conner, Leo.
Title: "Miniature motors for future PCs".
Source: MECHANICAL ENGINEERING, February, 1995
(vol. 116, no. 9). pp. 63-65.
Engineers at the University of California (Los Angeles) and the
California Institute of Technology (Pasadena) have developed and are
fine-tuning a micromotor that is to be added to the read-write head of future
personal computers. This device, which moves the head through a range of 20
microns above the data disk, is capable of vastly increasing the information
capacity of modern magnetic data storage systems.
From: Makishma.M.Cabo@Dartmouth.EDU (Makishma M. Cabo)
Authors: Mahesh Uttamlal and David R. Walt
Title: " A Fiber-Optic Carbon Dioxide Sensor for Fermentation Monitoring"
This fiber-optic chemical sensor was developed for determining dissolved carbon
dioxide and assessing its performance for on-line monitoring of fermentation.
The sensor operates on the Severinghaus pCO2 electrode principle; it consists
of a pH sensitive dye in an HCO3- buffer solution entrapped in an expanded PTFE
support head at the distal end of an optical fiber by a gas permeable
membrane. CO2 crossing the membrane produces a pH change in the indicator
On-line monitoring is important, not only for control strategies but for
providing a greater insight into the dynamics of the bio-reactions that
This paper was insightful in displaying a simple and inexpensive sensor that
can be used economically in the fermentation process.
From: Weldon.Cordell.Knighton@Dartmouth.EDU (Weldon Cordell Knighton)AND
From: Carla.N.Shelton@dartvax.dartmouth.edu Mon Jul 3 10:45:37 1995
Title: Effects of <110> oriented corner compensation structures on membrane
quality and convex corner integrity in <100> silicon using aqueous KOH.
Authors: R.P. van Kampen and R.F. Wolffenbuttel
This article was about the adding of compensation structures in an effort to
preserve the shape of convex corners when using a KOH etch. Experiments showed
that the <411> plane was responsible for the under-etching of these structures
and that a clean top to bottom compensation structure is not possible. The
compensation structures used were in the <100> and <110> directions. It is
also shown that the compensation structures leave ridges on the wanted
structure which can not be removed with further etching.