Engineering Sciences 65: The Science and Technology of Micro-machines

SYLLABUS AND COURSE SCHEDULE

Winter 1995

There are four parallel themes for the first half of the course:

Theme One

: Science and Technology of Microfabrication (Tuesdays). The science of microfabrication is discussed, in general. Structure control is the first topic, which breaks down into discussions of: photolithography; thin film deposition; and etching. Defect control is the second topic, breaking down into discussions of: diffusion; ion implantation; gettering and annealing. Structure and defects combine to dictate the properties of micro-machines.

Theme Two

: Science of Micro-machines (Thursdays). The thread of this theme starts with the properties of materials, relevant to micro-machines: mechanical, chemical, thermal, and electrical. Subsequently, analysis of the behavior of specific instances of micro-machines will be presented, in the context of these material properties.

Theme Three

: Practicum: Computer-Aided Design Tools (Wednesdays). The simulation workshops on Wednesdays will build a base of experience in various tools of interest to micro-fabrication in general, and micro-machines in particular. These include: mosaic; SUPREM-IV; FLOODS and FLOOPS; magic; and L-Edit.

Theme Four

: Practicum: Microfabrication (Afternoon lab sessions). Lab safety, and the practice of microfabrication, will be the focus of the laboratories during the first five weeks of the course. Specific micro-machines will be built and characterized: a micro-cantilever; and a micro-diaphragm.

In the second half of the course, these four themes will be utilized in a practical sense, through the design project, and amplified in the formal or academic sense, through presentation and discussion of more complex micro-machines and their fabrication processes.

DATE TOPIC READING

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Wednesday, January 4 X-hour: Organization Meeting. Overview. Videos.

Thursday, January 5 Review of chemical reactions and physical diffusion.

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Tuesday, January 10 Structure Control: Lithography (Optics and Photoresist)

Wednesday, January 11 X-hour: Simulation workshop (mosaic)

LAB: Safety; Micro-cantilever, Part One E. Schori, C. Levey

Thursday, January 12 Properties of materials I

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Tuesday, January 17 Structure Control: Thin Film Growth (Vapor phase epitaxy; oxidation; nitridation)

Wednesday, January 18 X-hour: Simulation workshop (SUPREM-IV)

LAB: Micro-cantilever, Part Two C. Levey

Thursday, January 19 Properties of materials II

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Tuesday, January 24 Structure Control: Thin Film Deposition (SiO2, Si3N4, polycrystalline silicon, and metals)

Wednesday, January 25 X-hour: Simulation workshop (L-Edit)

LAB: Micro-diaphragm, Part One C. Levey

Thursday, January 26 Micromechanical Device Behavior

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Tuesday, January 31 Structure Control: Etching

Wednesday, February 1 X-hour: The essentials of design

LAB: Micro-diaphragm, Part Two C. Levey

Thursday, February 2 Microsensor Device Behavior

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Tuesday, February 7 Defect Control: Simple Diffusion, Ion Implantation Solid, Liquid Source Doping

Wednesday, February 8 X-hour: One-on-one Group meetings

LAB: CAD: Begin Design of projects

Thursday, February 9 The MCNC MEMS fabrication process and examples

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Tuesday, February 14 Micro-machines: Case studies: Sensors

Wednesday, February 15 X-hour: One-on-one Group meetings

LAB: CAD: Design of projects

Thursday, February 16 Micro-machines: Case studies: Actuators

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Tuesday, February 21 Micro-machines: Case studies: Transducers

Wednesday, February 22 X-hour: One-on-one Group meetings

LAB: CAD: Design of projects

Thursday, February 23 Micro-machines: Case studies: Multiple device integration

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Monday, February 27 TAPE-OUT D-DAY: ALL DESIGNS SHIPPED TO MCNC

Tuesday, February 28 Micro-machines: Characterization and testing

LAB: Characterization Techniques

Thursday, March 2 Micro-machines: Review. Future Prospects

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Tuesday, March 7 Project Presentations

Wednesday, March 8 Last Day of Class. Project Presentations (continued, if necessary)

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Saturday, March 11 FINAL EXAMS BEGIN. First day to pick up take-home final.

Wednesday, March 15 LAST DAY OF FINAL EXAMS. Last day to turn in take-home final.

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