Engineering Sciences 65 Images

Guckel LIGA gears

Reference: H. Guckel, J. Micromech. and Microeng., Vol. 1, No. 1 (1991) [Cover].

Optical light chopper

Reference: V. P. Jaecklin, C. Linder, and N. F. de Rooij, "Optical microshutters and torsional micromirrors for light modulator arrays". Proc. IEEE Micro Electro Mech. Systems, p. 125 (1993).

Nickel tuning fork gyroscope

Reference: J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Maciel, and M. Weinberg, "A Micromachined comb-drive tuning fork rate gyroscope". Proc. IEEE Micro Electro Mech. Systems, p. 143 (1993).

Micro strain gauge

Reference: L. Lin, R. T. Howe, and A. P. Pisano, "A passive, in situ micro strain gauge". Proc. IEEE Micro Electro Mech. Systems, p. 201 (1993).

Electromechanical slider

Reference: T. Akiyama and K. Shono, "A new step motion of polysilicon microstructures". Proc. IEEE Micro Electro Mech. Systems, p. 272 (1993).

Micro rotor for blood flow

Reference: S. D. Rapoport, M. L. Reed, and L. E. Weiss, "Fabrication and testing of a microdynamic rotor for blood flow measurements." J. Micromech. and Microeng., Vol. 1, No. 1, p. 60 (1991).

Berkeley micro-fuses

Reference:

MIT microaccelerometer

Reference:

MIT shear stress sensor

Reference: H. D. Goldberg, A. Padmanabhan, M. A. Schmidt, and K. S. Breuer, "Shear-stress microsensors". Microsystems Technology Laboratories Annual Report, MIT, p. 28 (May 1994).

Mehregany electrostatic motor

Reference: M. Mehregany, Ph.D. dissertation, MIT

Microfabricated cell culture 'device'

Reference: L. J. Bousse, J. W. Parce, J. C. Owicki, and K. M. Kercso, "Silicon micromachining in the fabrication of biosensors using living cells". Tech. Dig. IEEE Solid-State Sensor and Actuator Workshop, p. 173 (1990).

Wisconsin magnetostatic motor

Reference: H. Guckel, T. R. Christenson, K. J. Skrobis, T. S. Jung, J. Klein, K. V. Hartojo, and I. Widjaja, "A first functional current excited planar rotational magnetic micromotor". Proc. IEEE Micro Electro Mech. Systems, p. 7 (1993).

Micro spear points

Reference: R. Dizon, H. Han, and M. L. Reed, "Single-mask processing of micromechanical piercing structures using ion milling." Proc. IEEE Micro Electro Mech. Systems, p. 48 (1993).