Deposition of Metals Using Either E-Beam Evaporation or Sputtering Techniques
I.
Vapor Deposition Techniques
II. PVD processes
Evaporation
Direct evaporation
Reactive evaporation
Activate reactive evaporation
E-beam heating
Sputtering
Glow discharge sputtering
DC/RF diode sputtering
Triode sputtering
Magnetron sputtering
Ion beam sputtering
Sputtering clean
III.
Future Trends in PVD