Glow-Discharge Sputtering

Glow-Discharge Sputtering

Glow-discharge sputtering

means the energetic particles used to strike target is generated by glow-discharge.

Creation of glow-discharge


Self-sustained mechanism


Parameters


Advantages:

Disadvantages:


Some Kind of Glow-Discharge Sputtering


Traping of impurities during the sputtering


Sputtering of multicomponent/compound coatings