Week 1: Wafer clean and oxidation

Week 2: Oxide measurement and Photomask #1

Week 3: Polysilicon deposition

Week 4: Polysilicon oxidation and annealing; Photomask #2

Week 5: Ion Implantation

Week 6: Implant activation and drive-in; isolation oxide; photomask #3

Week 7: Metal Deposition

Week 8: Photomask #4: Metal definition; Forming gas anneal


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November 13, 1995