Ellipsometer Procedure and Data

Procedure

Data

Thickness in angstroms, measured at center of wafer:
WaferWavelength 1Wavelength 2Average
1851685438530
2862986468638
3861486338624
4828282988290
5829383128303
6834683688357
Total Average:8457

Additional measurements of wafer #6:
LocationWavelength 1Wavelength 2Average
Top Edge836983898379
Right Edge834783758361


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November 13, 1995