Thayer School of Engineering Winter 2008
ENGS 135Thin Films and Microfabrication
The associated techniques of microfabrication and thin film deposition play an important role in modern science and engineering, with applications ranging from thin film optical coatings to microelectronics and microelectromechanical systems (MEMS). This course starts with theoretical and experimental background in the vapor deposition of thin films, and characterization of such films for optical, electrical, and mechanical applications. We next consider how such films can be patterned to form integrated systems of very small parts. We take a MEMS micromotor, a pressure sensor, and CMOS transistors as case studies. We then fill out the toolbox of microfabrication processing techniques with additional growth, deposition, doping, and etching techniques, and provide design experience using a microfabrication layout editor (L-Edit). We also compare top-down approaches (such as photolithographic patterning) to bottom-up approaches (such as self-assembling structures), and we consider the implication of scaling laws on effective microsystem design. The course will include field trips to industrial thin film and MEMS fabrication facilities.
Course assignments will include: reading, lab work and reports, two student paper/presentations, a layout design project, homework, and quizzes.
Prerequisite: ENGS 24 (Materials Science), equivalent, or consent of instructor.
This half of the course is designed to give you some theoretical and experimental background in vapor deposition of thin films, some simple patterning techniques, and the optical and electrical implications of material in thin film form.
Assignments - Weekly lab reports Midterm paper Reading and weekly online quizzesThe Honor Principle
The first half of the course concerns thin films, and stacks of such films
of various thicknesses, i.e. a pattern in the vertical dimension.
We now expand our design space to include patterning in lateral dimensions
to create integrated systems of very small parts (ICs and MEMS). We motivate
and organize discussion of the fabrication techniques required by looking at
the steps required to make a surface micromachined motor, a MEMS pressure
sensor, and a MOS transistor.
Assignments- Weekly Lab reports Midterm paper presentation Reading, quizzes, homework Design Project
Other Techniques (Student Presentations)
Ursula Gibson, 219c Cummings, 646-3243
Christopher Levey, 217e Cummings, 646-2071