1. Introduction

This manual describes the Consolidated Micromechanical Element Library, CaMEL. The library consists of two independent parts; the nonparameterized cell database and the parameterized microelectromechanical element library, PME. The aim is to provide MEMS cell libraries that are not only useful for novice MEMS designers, but to experienced ones as well. Both libraries are intended to assist the user in the design and layout of MEMS devices by providing an initial layout for components of a MEMS system. It is assumed that the user will modify these elements and customize them as desired and assemble designs using a suitable mask layout editor (the layout editor must support non-rectangular geometries).

The nonparameterized cell library is a database of MEMS designs in various process technologies contributed by different sources. Further design contributions from the MEMS community for addition to the library are actively solicited! (See Chapter 2 for details.) The nonparameterized library tools are written using the Practical Extraction and Report Language, perl. Perl can be obtained via ftp from the Free Software Foundation at prep.ai.mit.edu. Layout for cells in the library is available in Caltech Intermediate Form (CIF) and GDS II formats.

The PME library includes a set of generators that can be used to create customized layout for many common MEMS components that use a surface micromachined process technology such as the MUMPS process. Technology specific design rules are used to ensure that the layout will conform to process requirements. The generators support CIF and GDS II mask formats, as well as PostScript for viewing or printing purposes. The library framework can also be used to write customized generators for other process technolgies. The PME library is currently available on Sun-Sparc and HP workstation platforms.

Bug reports, suggestions, and contributions are actively solicited and should be sent to camel@mcnc.org.